Presenter: Ernesto Vega Janica and Jonathan Eisenberg

Our research is based on technical provisions of NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities, and ANSI/CGA standards as approved methods for the protection of semiconductor fabrication facilities for bulk silane storage and handling. In this session, a real case scenario is examined under Code regulations and possible detection system layouts are analyzed. Our lessons learned are also discussed.